核燃料颗粒化学气相沉积包覆铌层的热力学分析

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Thermodynamic Analysis of Chemical Vapor Depositing Nb Coating on Fuel Particles

National Key Laboratory for Reactor Fuel and Materials, Nuclear Power Institute ofChina, Chengdu, 610041, China

摘要: 燃料颗粒表面涂覆Nb层采用的是流态化化学气相沉积(CVD)技术。采用HSC Chemistry 6.0软件,对该工艺过程进行热力学模拟计算,分析各工艺参数对反应产物的影响。结果表明:提高沉积温度,有利于金属Nb的生成,并减少副产物的含量;随着氢气与NbCl5的摩尔比的增加,反应所得产物中的Nb含量也随之增加;Ar气也可以一定程度上影响平衡反应产物的组成,一定量的Ar气有助于金属Nb的生成,减少副产物。
- 包覆型燃料颗粒 /
- Nb涂层 /
- 流态化化学气相沉积 /
- 热力学计算
Abstract: Nb coating is the chemical vapor deposited on the surface of fuel particles in the fluidized bed.Thermodynamic calculation of chemical vapor deposition process was studied with HSC Chemistry 6.0 code.According to the data,the effect of processing parameters on the composition of the resultant was discussed.The result shows that:higher deposition temperature is in favor of the generation of Nb and the content of by-products is reduced; with the increasing of the H₂/NbCl₅ mole ratio,the Nb content in the resultant increases; some Ar addition improves the productivity of Nb and presses the formation of by-products.
- Coated fuel particle /
- Nb coating /
- Fluidization chemical vapor deposition /
- Thermodynamic calculation