Abstract: Reliability and technique centered maintenance（RtCM） is a systematic engineering method used to determine the preventive maintenance requirement of equipment assets and optimizing the maintenance system. This paper has introduced the process and technological innovation of RtCM method through a practical example of RtCM application in the moisture separator reheater system in a nuclear power plant. Besides, the economic benefit resulting from RtCM application was evaluated. The results indicate that RtCM method, into which the maintenance templates, technical characteristic analysis, equipment identification and quantitative analysis technique were introduced, is a more efficient and more advanced method in the maintenance the optimization field and plays an important role in improving the equipment reliability.