注入N离子改性的Ti-2Al-2.5Zr合金表面性能研究

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Surface Modification of a Ti-2AI-2.5Zr Alloy by N Ion Implantation

1 Department of Applied Physics, University of Electronic Science and Technology, Chengdu, 610054, China;
2 Department of Physics, Sichuan University, Key Laboratory for Radiation Physics and Technology of Ministry of Education, Chengdu, 610064, China;
3 National Key Laboratory for Nuclear Fuel and Material, Nuclear Power Institute of China, Chengdu, 610041, China

摘要: 往Ti-2Al-2.5Zr合金中注入能量为75 keV的N离子,注入剂量为3×10¹⁷/cm²和8×10¹⁷/cm²。75 keV N离子在Ti-2Al-2.5Zr合金的射程,借助TRIM 96程序计算的结果为1.2×10^-7m。测试结果表明,Ti-2Al-2.5Zr合金的显微硬度随N离子注量的增加而升高,当注量为3×10¹⁷/cm²和8×10¹⁷/cm²时,Ti-2Al-2.5Zr合金的硬度分别升高260%和340%。注入后的样品用X射线衍射法及光电子能谱法进行分析。XRD衍射谱分析表明,Ti-2Al-2.5Zr合金有TiN新相生成。TiN相的生成被认为是Ti-2Al-2.5Zr合金显微硬度增加的主要原因。
- N离子注入 /
- Ti-2Al-2.5Zr合金 /
- XRD /
- 显微硬度
Abstract: Implantation-enhanced hardening of a Ti-2Al-2.5Zr alloy by 75keV nitrogen ion implantation with the dose of 3×10¹⁷ N⁺ cm^-2 and 8×10¹⁷ N⁺ cm^-2 is investigated. The surface characterization of samples was studied by XRD and Vickers hardness tests. The nitrogen implantation increases the surface hardness up 340% and 260 for the dose of 8×10¹⁷ and 3×10¹⁷ N⁺ cm^-2, respectively. The results of XRD analysis show that TiN is formed in the surface region. Nitrogen-ion-implantation-enhanced hardening is mainly due to the formation of TiN.
- Nitrogen ion implantation /
- Ti-2Al-2.5Zr alloy /
- X-ray diffraction /
- Micro-hardness