Abstract: Spherical titanium（Ti） particles were obtained by the process of heating irregularly shaped Ti powders under the radio frequency induction plasma（RF induction plasma） condition.The effect of feed rate,various dispersion methods and Ti particle size on the spheroidization efficiency was studied.The efficiency of the spheroidization is evaluated through the measurements of the percentage of powder spheroidized based on the electron microscopic observations and the tap density measurement of the processed powder.During the short flight of the particles in the plasma flow,of the order of a few milliseconds,the individual titanium particles of the powder are heated and melt,forming a spherical liquid droplet which upon freezing gives rise to the formation of a perfectly dense spherical solid particle.So RF induction plasma is a promising method for the preparation of spherical titanium powders with high flowability.