Effect of Performance of Zr-Y Alloy Target on Thin Film Deposition Technology

Yttria-stabilized zirconia（YSZ） films are synthesized on corrosion resistant plates by pulsed bias arc ion plating.The arc starting performance and the stability of thin film deposition is explored by improving the uniformity and compactibility of Zr-Y alloy target.The property of Zr-Y alloy target and depositional thin films were measured with the optical microscope,scanning electron microscope,X-ray diffractometer.The result shows that the target with hot rolling and annealing has a good arc starting performance and stability of thin film deposition,and the depositional thin films made of Yttria and amorphous zirconia are homogeneous and compact.