Thermodynamic Analysis of Chemical Vapor Depositing Nb Coating on Fuel Particles

Nb coating is the chemical vapor deposited on the surface of fuel particles in the fluidized bed.Thermodynamic calculation of chemical vapor deposition process was studied with HSC Chemistry 6.0 code.According to the data,the effect of processing parameters on the composition of the resultant was discussed.The result shows that:higher deposition temperature is in favor of the generation of Nb and the content of by-products is reduced; with the increasing of the H₂/NbCl₅ mole ratio,the Nb content in the resultant increases; some Ar addition improves the productivity of Nb and presses the formation of by-products.